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3D characterisation of materials using a dual beam

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Location: P523

The microstructures of materials cannot always be adequately described using conventional 2D analysis. A number of examples are presented where 3D analysis has been used to study real shapes and interconnectivity of grains and phases using various imaging and analytical modes in a dual beam microscope.

In particular a combined Electron Backscatter Diffraction (EBSD) Energy Dispersive Spectroscopy (EDS) method is described, which provides a powerful complementary combination of quantitative crystallographic and chemical analysis. How this automated technique can be optimised, the datasets produced and how the microstructures can be reconstructed in 3D are all discussed for a range of material types.

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Condensed Matter Physics

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